Non destructive testing of electronic devices by acoustic microscopy

2014 The interest of the scanning acoustic microscope previously demonstrated in the biomedical field is extended to microelectronic applications. The properties of penetrating and focusing of acoustic waves in solids are particularly suitable for non destructive observation of surface and subsurface of solid state structure and device such as integrated circuit, epitaxial, implanted and diffused layers. Up to date it is one of the best ways to visualize underneath the surface of solids opaque to light and electronic rays. REVUE DE PHYSIQUE APPLIQUÉE TOME 13, DÉCEMBRE 1978,